| Feol low-k spacers KS Collins, K Ramaswamy, Y Zhang, H Chang, L Dorf, MF Wu, S Rauf US Patent App. 14/323,855, 2016 | 169 | 2016 |
| Plume reduction in segmented electrode Hall thruster Y Raitses, LA Dorf, AA Litvak, NJ Fisch Journal of Applied Physics 88 (3), 1263-1270, 2000 | 109 | 2000 |
| System for tunable workpiece biasing in a plasma reactor T Koh, PA Kraus, L Dorf, P Gopalraja US Patent 10,373,804, 2019 | 91 | 2019 |
| Experimental onset threshold and magnetic pressure pile-up for 3D reconnection TP Intrator, X Sun, G Lapenta, L Dorf, I Furno Nature Physics 5 (7), 521-526, 2009 | 79 | 2009 |
| Current-driven rotating-kink mode in a plasma column with a non-line-tied free end I Furno, TP Intrator, DD Ryutov, S Abbate, T Madziwa-Nussinov, A Light, ... Physical review letters 97 (1), 015002, 2006 | 76 | 2006 |
| Variable operation of Hall thruster with multiple segmented electrodes NJ Fisch, Y Raitses, LA Dorf, AA Litvak Journal of Applied Physics 89 (4), 2040-2046, 2001 | 72 | 2001 |
| Experimental studies of anode sheath phenomena in a Hall thruster discharge L Dorf, Y Raitses, NJ Fisch Journal of Applied Physics 97 (10), 2005 | 58 | 2005 |
| Anode sheath in Hall thrusters L Dorf, V Semenov, Y Raitses Applied physics letters 83 (13), 2551-2553, 2003 | 56 | 2003 |
| Ion-ion plasma atomic layer etch process and reactor KS Collins, K Ramaswamy, JD Carducci, S Rauf, L Dorf, Y Yang US Patent 10,475,626, 2019 | 55 | 2019 |
| Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber Z Chen, S Rauf, WR Merry, L Dorf, K Ramaswamy, KS Collins US Patent 8,313,664, 2012 | 55 | 2012 |
| System for tunable workpiece biasing in a plasma reactor T Koh, PA Kraus, L Dorf, P Gopalraja US Patent 10,923,320, 2021 | 51 | 2021 |
| Adjustable extended electrode for edge uniformity control O Luere, L Dorf, R Dhindsa, S Srinivasan, DM Koosau, J Rogers US Patent 10,504,702, 2019 | 50 | 2019 |
| Electrostatic probe apparatus for measurements in the near-anode region of Hall thrusters L Dorf, Y Raitses, NJ Fisch Review of Scientific Instruments 75 (5), 1255-1260, 2004 | 49 | 2004 |
| Effects of boundary conditions and flow on the kink instability in a cylindrical plasma column I Furno, TP Intrator, G Lapenta, L Dorf, S Abbate, DD Ryutov Physics of plasmas 14 (2), 2007 | 42 | 2007 |
| Processing with powered edge ring L Dorf, AK Mishra, O Luere, R Dhindsa, J Rogers, DM Koosau, ... US Patent App. 16/253,655, 2019 | 41 | 2019 |
| Systems and methods for controlling a voltage waveform at a substrate during plasma processing L Dorf, JH Rogers, O Luere, T Koh, R Dhindsa, S Srinivasan US Patent App. 15/618,082, 2017 | 41 | 2017 |
| Experimental demonstration of plasma-drag acceleration of a dust cloud to hypervelocities CM Ticoş, Z Wang, GA Wurden, JL Kline, DS Montgomery, LA Dorf, ... Physical review letters 100 (15), 155002, 2008 | 41 | 2008 |
| Method of controlling ion energy distribution using a pulse generator with a current-return output stage L Dorf, O Luere, R Dhindsa, J Rogers, S Srinivasan, AK Mishra US Patent 10,555,412, 2020 | 40 | 2020 |
| Effect of anode dielectric coating on Hall thruster operation L Dorf, Y Raitses, NJ Fisch, V Semenov Applied Physics Letters 84 (7), 1070-1072, 2004 | 39 | 2004 |
| Etching with atomic precision by using low electron temperature plasma L Dorf, JC Wang, S Rauf, GA Monroy, Y Zhang, A Agarwal, J Kenney, ... Journal of Physics D: Applied Physics 50 (27), 274003, 2017 | 38 | 2017 |
Shahid RaufApplied Materials, Inc.Verified email at amat.com
