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Ivo Utke
Ivo Utke
PhD, Empa-Swiss Federal Laboratories for Materials Science and Technology
Verified email at empa.ch - Homepage
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Cited by
Cited by
Year
Gas-assisted focused electron beam and ion beam processing and fabrication
I Utke, P Hoffmann, J Melngailis
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
12452008
Nanofabrication using focused ion and electron beams: principles and applications
I Utke, S Moshkalev, P Russell
Oxford University Press, 2012
3422012
Measurement of the bending strength of vapor− liquid− solid grown silicon nanowires
S Hoffmann, I Utke, B Moser, J Michler, SH Christiansen, V Schmidt, ...
Nano letters 6 (4), 622-625, 2006
3032006
Focused electron beam induced deposition of gold
I Utke, P Hoffmann, B Dwir, K Leifer, E Kapon, P Doppelt
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
2162000
High-resolution magnetic Co supertips grown by a focused electron beam
I Utke, P Hoffmann, R Berger, L Scandella
Applied physics letters 80 (25), 4792-4794, 2002
2092002
Submicrometer Hall devices fabricated by focused electron-beam-induced deposition
G Boero, I Utke, T Bret, N Quack, M Todorova, S Mouaziz, P Kejik, ...
Applied Physics Letters 86 (4), 2005
1352005
Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals
I Utke, A Luisier, P Hoffmann, D Laub, PA Buffat
Applied Physics Letters 81 (17), 3245-3247, 2002
1222002
Reaction and Growth Mechanisms in Al2O3 deposited via Atomic Layer Deposition: Elucidating the Hydrogen Source
C Guerra-Nuńez, M Döbeli, J Michler, I Utke
Chemistry of Materials 29 (20), 8690-8703, 2017
1182017
Granular Co–C nano-Hall sensors by focused-beam-induced deposition
M Gabureac, L Bernau, I Utke, G Boero
Nanotechnology 21 (11), 115503, 2010
1122010
Gold elliptical nanoantennas as probes for near field optical microscopy
O Sqalli, I Utke, P Hoffmann, F Marquis-Weible
Journal of applied physics 92 (2), 1078-1083, 2002
1072002
Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold
T Brintlinger, MS Fuhrer, J Melngailis, I Utke, T Bret, A Perentes, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2005
1062005
Optimized molecule supply from nozzle-based gas injection systems for focused electron-and ion-beam induced deposition and etching: simulation and experiment
V Friedli, I Utke
Journal of Physics D: Applied Physics 42 (12), 125305, 2009
1052009
Boron nitride nanoporous membranes with high surface charge by atomic layer deposition
M Weber, B Koonkaew, S Balme, I Utke, F Picaud, I Iatsunskyi, E Coy, ...
ACS applied materials & interfaces 9 (19), 16669-16678, 2017
972017
Cross Section Investigations of Compositions and Sub‐Structures of Tips Obtained by Focused Electron Beam Induced Deposition
I Utke, J Michler, PH Gasser, C Santschi, D Laub, M Cantoni, PA Buffat, ...
Advanced Engineering Materials 7 (5), 323-331, 2005
922005
High Spatial Resolution Time‐of‐Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB‐SIMS Instrument with In Situ AFM
JA Whitby, F Östlund, P Horvath, M Gabureac, JL Riesterer, I Utke, M Hohl, ...
Advances in Materials Science and Engineering 2012 (1), 180437, 2012
902012
Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review
H Plank, R Winkler, CH Schwalb, J Hütner, JD Fowlkes, PD Rack, I Utke, ...
Micromachines 11 (1), 48, 2019
892019
Small, minimally invasive, direct: electrons induce local reactions of adsorbed functional molecules on the nanoscale
I Utke, A Gölzhäuser
Angewandte Chemie International Edition 49 (49), 9328-9330, 2010
862010
Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties
R Raghavan, M Bechelany, M Parlinska, D Frey, WM Mook, A Beyer, ...
Applied physics letters 100 (19), 2012
832012
Continuum models of focused electron beam induced processing
M Toth, C Lobo, V Friedli, A Szkudlarek, I Utke
Beilstein journal of nanotechnology 6 (1), 1518-1540, 2015
802015
Thermal effects during focused electron beam induced deposition of nanocomposite magnetic-cobalt-containing tips
I Utke, T Bret, D Laub, P Buffat, L Scandella, P Hoffmann
Microelectronic engineering 73, 553-558, 2004
782004
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