| Optical field enhancement effects in laser-assisted particle removal M Mosbacher, HJ Münzer, J Zimmermann, J Solis, J Boneberg, P Leiderer Applied Physics A 72, 41-44, 2001 | 236 | 2001 |
| Local field enhancement effects for nanostructuring of surfaces HJ Münzer, M Mosbacher, M Bertsch, J Zimmermann, P Leiderer, ... Journal of microscopy 202 (1), 129-135, 2001 | 221 | 2001 |
| Imaging optical near-fields of nanostructures P Leiderer, C Bartels, J Koenig-Birk, M Mosbacher, J Boneberg Applied Physics Letters 85 (22), 5370-5372, 2004 | 108 | 2004 |
| Universal threshold for the steam laser cleaning of submicron spherical particles from silicon M Mosbacher, V Dobler, J Boneberg, P Leiderer Applied Physics A 70, 669-672, 2000 | 103 | 2000 |
| A comparison of ns and ps steam laser cleaning of Si surfaces M Mosbacher, N Chaoui, J Siegel, V Dobler, J Solis, J Boneberg, ... Applied Physics A 69, S331-S334, 1999 | 80 | 1999 |
| Laser cleaning of polymer surfaces T Fourrier, G Schrems, T Mühlberger, J Heitz, N Arnold, D Bäuerle, ... Applied Physics A 72, 1-6, 2001 | 78 | 2001 |
| Surface acceleration during dry laser cleaning of silicon V Dobler, R Oltra, JP Boquillon, M Mosbacher, J Boneberg, P Leiderer Applied Physics A 69, S335-S337, 1999 | 76 | 1999 |
| Laser-induced particle removal from silicon wafers P Leiderer, J Boneberg, V Dobler, M Mosbacher, HJ Münzer, N Chaoui, ... High-Power Laser Ablation III 4065, 249-259, 2000 | 74 | 2000 |
| Near field induced defects and influence of the liquid layer thickness in Steam Laser Cleaning of silicon wafers F Lang, M Mosbacher, P Leiderer Applied Physics A 77, 117-123, 2003 | 61 | 2003 |
| Optical near-field effects in surface nanostructuring and laser cleaning HJ Münzer, M Mosbacher, M Bertsch, O Dubbers, F Burmeister, A Pack, ... Second International Symposium on Laser Precision Microfabrication 4426, 180-183, 2002 | 45 | 2002 |
| Imprinting the optical near field of microstructures with nanometer resolution P Kühler, FJ García de Abajo, J Solis, M Mosbacher, P Leiderer, ... small 5 (16), 1825-1829, 2009 | 43 | 2009 |
| Laser cleaning of silicon wafers: mechanisms and efficiencies M Mosbacher, M Bertsch, HJ Muenzer, V Dobler, BU Runge, D Baeuerle, ... Second International Symposium on Laser Precision Microfabrication 4426, 308-314, 2002 | 34 | 2002 |
| Dynamic particle removal by nanosecond dry laser cleaning: theory N Arnold, G Schrems, T Mühlberger, M Bertsch, M Mosbacher, P Leiderer, ... Second International Symposium on Laser Precision Microfabrication 4426, 340-346, 2002 | 31 | 2002 |
| Laser cleaning of silicon surfaces P Leiderer, J Boneberg, M Mosbacher, A Schilling, O Yavas Laser applications in microelectronic and optoelectronic manufacturing III …, 1998 | 30 | 1998 |
| Matrix laser cleaning: a new technique for the removal of nanometer sized particles from semiconductors J Graf, BS Luk’yanchuk, M Mosbacher, MH Hong, CT Chong, J Boneberg, ... Applied Physics A 88, 227-230, 2007 | 27 | 2007 |
| Ultraviolet optical near-fields of microspheres imprinted in phase change films J Siegel, D Puerto, J Solis, FJ García de Abajo, CN Afonso, M Longo, ... Applied Physics Letters 96 (19), 2010 | 25 | 2010 |
| Infrared steam laser cleaning P Frank, F Lang, M Mosbacher, J Boneberg, P Leiderer Applied Physics A 93, 1-4, 2008 | 19 | 2008 |
| A high-sensitivity in situ optical diagnostic technique for laser cleaning of transparent substrates N Chaoui, J Solis, CN Afonso, T Fourrier, T Muehlberger, G Schrems, ... Applied Physics A 76, 767-771, 2003 | 17 | 2003 |
| Laser assisted particle removal from silicon wafers M Mosbacher, HJ Münzer, M Bertsch, V Dobler, N Chaoui, J Siegel, ... Particles on Surfaces: Detection, Adhesion and Removal, Volume 7, 275-293, 2023 | 14 | 2023 |
| Femtosecond-resolved ablation dynamics of Si in the near field of a small dielectric particle P Kühler, D Puerto, M Mosbacher, P Leiderer, FJG de Abajo, J Siegel, ... Beilstein Journal of Nanotechnology 4 (1), 501-509, 2013 | 14 | 2013 |
