Krishna Nittala
Krishna Nittala
Applied Materials
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The Role of Spontaneous Polarization in the Negative Thermal Expansion of Tetragonal PbTiO3-Based Compounds
J Chen, K Nittala, JS Forrester, JL Jones, J Deng, R Yu, X Xing
Journal of the American Chemical Society 133 (29), 11114-11117, 2011
Low-K oxide deposition by hydrolysis and condensation
NM Ndiege, K Nittala, DB Wong, GA Antonelli, NS Draeger, ...
US Patent 9,245,739, 2016
Phase and texture evolution in solution deposited lead zirconate titanate thin films: Formation and role of the Pt3Pb intermetallic phase
K Nittala, S Mhin, KM Dunnigan, DS Robinson, JF Ihlefeld, PG Kotula, ...
Journal of Applied Physics 113 (24), 244101, 2013
Structural evidence for the nonmonotonic trend of TC in tetragonal PbTiO 3 BiScO 3 solid solutions
J Chen, K Nittala, JL Jones, P Hu, X Xing
Applied Physics Letters 96 (25), 252908, 2010
Structure and piezoelectric properties near the bismuth scandium oxide–lead zirconate–lead titanate ternary morphotropic phase boundary
A Sehirlioglu, A Sayir, F Dynys, K Nittala, J Jones
Journal of the American Ceramic Society 94 (3), 788-795, 2011
In situ x-ray diffraction of solution-derived ferroelectric thin films for quantitative phase and texture evolution measurement
K Nittala, S Mhin, JL Jones, DS Robinson, JF Ihlefeld, GL Brennecka
Journal of Applied Physics 112 (10), 104109, 2012
Phase evolution in solution deposited Pb-deficient PLZT thin films
K Nittala, GL Brennecka, BA Tuttle, JL Jones
Journal of materials science 46, 2148-2154, 2011
Low-temperature spin spray deposited ferrite/piezoelectric thin film magnetoelectric heterostructures with strong magnetoelectric coupling
Z Zhou, O Obi, TX Nan, S Beguhn, J Lou, X Yang, Y Gao, M Li, S Rand, ...
Journal of Materials Science: Materials in Electronics 25, 1188-1192, 2014
Role of the PbTiO3 Seed Layer on the Crystallization Behavior of PZT Thin Films
S Mhin, K Nittala, C Cozzan, K Kim, DS Robinson, LM Sanchez, ...
Journal of the American Ceramic Society 98 (5), 1407-1412, 2015
Phase and texture evolution in chemically derived PZT thin films on Pt substrates
S Mhin, K Nittala, J Lee, DS Robinson, JF Ihlefeld, GL Brennecka, ...
Journal of the American Ceramic Society 97 (9), 2973-2979, 2014
Effect of Switching Atmospheric Conditions during Crystallization on the Phase Evolution of Solution‐Derived Lead Zirconate Titanate Thin Films
S Mhin, C Cozzan, K Nittala, P Wanninkhof, JF Ihlefeld, GL Brennecka, ...
Journal of the American Ceramic Society 96 (9), 2706-2709, 2013
In situ X-ray diffraction based investigation of crystallization in solution deposited PZT thin films
K Nittala
University of Florida, 2012
Hydrogen management in plasma deposited films
R Cheng, D Kedlaya, K Janakiraman, GK Hemani, K Nittala, AJ Lustgraaf, ...
US Patent 11,562,902, 2023
Controlling concentration profiles for deposited films using machine learning
AV Baryshnikov, A Aydin, Z Huang, R Cheng, Y Yang, D Kedlaya, ...
US Patent 11,532,525, 2022
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films
K Ghosh, MG Kulkarni, S Baluja, K Nittala
US Patent 11,508,611, 2022
Film formation via pulsed RF plasma
K Nittala, DN Kedlaya, K Janakiraman, Y Yang, R Cheng
US Patent 11,443,919, 2022
Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition
JY Hsu, K Nittala, P Manna, K Janakiraman
US Patent 11,421,324, 2022
Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers
K Nittala, SM Bobek, KD Lee, R Limdulpaiboon, D Kioussis, ...
US Patent App. 17/179,103, 2022
Boron concentration tunability in boron-silicon films
Y Yang, K Nittala, R Cheng, K Janakiraman, D Kedlaya, Z Huang, A Aydin
US Patent App. 17/063,339, 2022
Method of using dual frequency rf power in a process chamber
AK Singh, R Kustra, VV Hassan, B Kumar, K Nittala, P Manna, ...
US Patent App. 17/035,107, 2022
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