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Yoshikazu HIRAI
Yoshikazu HIRAI
Junior Associate Professor, Kyoto University
Verified email at me.kyoto-u.ac.jp - Homepage
Title
Cited by
Cited by
Year
Moving mask UV lithography for three-dimensional structuring
Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
942006
Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ...
RSC advances 7 (58), 36777-36786, 2017
902017
Experimental study of numerical optimization for 3-D microstructuring using DMD-based grayscale lithography
X Ma, Y Kato, F Van Kempen, Y Hirai, T Tsuchiya, F Van Keulen, ...
Journal of Microelectromechanical Systems 24 (6), 1856-1867, 2015
332015
Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device
T Tsuchiya, T Hemmi, J Suzuki, Y Hirai, O Tabata
Applied Sciences 8 (6), 880, 2018
312018
A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)
N Matsuzuka, Y Hirai, O Tabata
Journal of Micromechanics and Microengineering 15 (11), 2056, 2005
312005
Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
Y Hirai, S Hafizovic, N Matsuzuka, JG Korvink, O Tabata
Journal of microelectromechanical systems 15 (1), 159-168, 2006
272006
Phenotypic and transcriptional modulation of human pluripotent stem cells induced by nano/microfabrication materials
K Kamei, Y Hirai, M Yoshioka, Y Makino, Q Yuan, M Nakajima, Y Chen, ...
Advanced healthcare materials 2 (2), 287-291, 2013
252013
Integrated-gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease
J Yang, Y Hirai, K Iida, S Ito, M Trumm, S Terada, R Sakai, T Tsuchiya, ...
Communications Biology 6 (1), 310, 2023
242023
Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist
Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of microelectromechanical systems 19 (5), 1058-1069, 2010
222010
Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
K Tsujimoto, Y Hirai, K Sugano, T Tsuchiya, O Tabata
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
21*2011
A three-dimensional microstructuring technique exploiting the positive photoresist property
Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 20 (6), 065005, 2010
212010
Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
H Yagyu, Y Hirai, A Uesugi, Y Makino, K Sugano, T Tsuchiya, O Tabata
Polymer 53 (21), 4834-4842, 2012
202012
Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
W Zhang, Y Hirai, T Tsuchiya, O Tabata
Applied Surface Science 443, 48-54, 2018
162018
Direct measurement of transversely isotropic DNA nanotube by force–distance curve‐based atomic force microscopy
Z Ma, YJ Kim, S Park, Y Hirai, T Tsuchiya, DN Kim, O Tabata
Micro & Nano Letters 10 (10), 513-517, 2015
162015
ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
Y Hirai, D Takagi, S Anai, Y Chihara, T Tsuchiya, K Fujimoto, Y Hirao, ...
Sensors and Actuators B: Chemical 213, 547-557, 2015
162015
X3D: 3D X-ray lithography and development simulation for MEMS
S Hafizovic, Y Hirai, O Tabata, JG Korvink
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
162003
High-temperature tensile testing machine for investigation of brittle–ductile transition behavior of single crystal silicon microstructure
A Uesugi, T Yasutomi, Y Hirai, T Tsuchiya, O Tabata
Japanese Journal of Applied Physics 54 (6S1), 06FP04, 2015
152015
A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography
N Matsuzuka, Y Hirai, O Tabata
17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004
152004
Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
Y Shu, Y Hirai, T Tsuchiya, O Tabata
Japanese Journal of Applied Physics 58 (SD), SDDL06, 2019
142019
Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded aC: H film
Y Xia, Y Hirai, T Tsuchiya
Surface and Coatings Technology 405, 126559, 2021
132021
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