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Michel Dantas
Michel Dantas
Professor Doutor, CECS, Universidade Federal do ABC
Verified email at ufabc.edu.br
Title
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Cited by
Year
Silicon field-emission devices fabricated using the hydrogen implantation–porous silicon (HI–PS) micromachining technique
MOS Dantas, E Galeazzo, HEM Peres, MM Kopelvski, ...
Journal of microelectromechanical systems 17 (5), 1263-1269, 2008
162008
Characterization system based on image mapping for field emission devices
MM Kopelvski, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
Measurement 93, 208-214, 2016
142016
HI–PS technique for MEMS fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, A Errachid
Sensors and Actuators A: Physical 115 (2-3), 608-616, 2004
142004
Silicon micromechanical structures fabricated by electrochemical process
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
IEEE sensors journal 3 (6), 722-727, 2003
142003
ZnO nanowire-based field emission devices through a microelectronic compatible route
MO da Silva Dantas, D Criado, A Zúñiga, W Silva, E Galeazzo, H Peres, ...
Journal of Integrated Circuits and Systems 15 (1), 1-6, 2020
62020
Potentialities of a new dedicated system for real time field emission devices characterization: a case study
MM Kopelvski, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
2019 4th International Symposium on Instrumentation Systems, Circuits and …, 2019
62019
Development of fast response humidity sensors based on carbon nanotubes
MC Moraes, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
Proc. IEEE 5th Int. Conf. Sensor Device Technol. Appl, 7-10, 2014
62014
Otimização do processo de obtenção do PS por processo eletroquímico e sua obtenção em áreas seletivas
MOS Dantas
Monografia apresentada a Faculdade de Tecnologia de sao Paulo, 2000
62000
Eletrochemical Process for Silicon Tips Fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
Eletrochemical Society Proceedings 9, 445-452, 2003
52003
MWCNT devices fabricated by dielectrophoresis: Study of their electrical behavior related to deposited nanotube amount for gas sensing applications
E Galeazzo, MC Moraes, HEM Peres, MOS Dantas, VGC Lobo, ...
Journal of Integrated Circuits and Systems 10 (1), 13-20, 2015
42015
Porous silicon masking by silicon oxide and hydrogen ion implantation
HE Peres, E Galeazzo, MO Dantas, FJ Ramirez-Fernandez
Proceeding of the XVI International Conference on Microelectronics and …, 2001
42001
Obtenção de microestruturas de silício utilizando a tecnologia do silício poroso como camada sacrificial
MOS Dantas, E Galeazzo
32003
Silicon micromechanical structures fabricated by electrochemical process
MOS Dantas, E Galeazzo, HEM Pees, FJR Fernandez
SENSORS, 2002 IEEE 1, 575-579, 2002
32002
ZnO nanowires growth from thin zinc films for field emission purposes
MOS Dantas, DCP Souza, AA Zúñiga-Páez, WAA Silva, E Galeazzo, ...
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2019
22019
Evaluation of the Electrical Resistance Response of Insulating Glass Surface to Sense and Classify Humidity and VOCs Vapors
HEM Peres, E Galeazzo, MOS Dantas, W Beccaro, GP Filbrich, ...
IEEE Sensors Journal 18 (10), 3940 - 3945, 2018
22018
Improvement of Si Field Emission Sensors Fabrication Technology by Carbon Nanotubes
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
Proceedings IMCS 2012, 1005-1008, 2012
2*2012
Porous silicon sacrificial layers applied on micromechanical structures fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJR Fernandez
Microelectronics Technology and Devices, SBMICRO 2002: Proceedings of the …, 2002
22002
Field emission enhancement achieved by selective multi-walled carbon nanotubes deposition over silicon microstructures
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
2014 29th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2014
12014
Electrical behavior of devices composed by dielectrophoretically deposited carbon nanotubes for gas sensing applications
MC Moraes, E Galeazzo, HEM Peres, MOS Dantas, ...
2014 29th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2014
12014
Desenvolvimento de dispositivos de emissão por efeito de campo elétrico fabricados pela técnica HI-PS
MOS Dantas
Tese apresentada à Universidade de São Paulo, 2008
12008
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Articles 1–20