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Jun-Chieh Wang
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Etching with atomic precision by using low electron temperature plasma
L Dorf, JC Wang, S Rauf, GA Monroy, Y Zhang, A Agarwal, J Kenney, ...
J. Phys. D: Appl. Phys. 50, 274003, 2017
382017
Electron current extraction from radio frequency excited micro-dielectric barrier discharges
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
Journal of Applied Physics 113 (3), 2013
242013
Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze
Plasma Sources Science and Technology 30 (7), 075031, 2021
162021
Charging of moving surfaces by corona discharges sustained in air
JC Wang, D Zhang, N Leoni, H Birecki, O Gila, MJ Kushner
Journal of Applied Physics 116 (4), 2014
132014
A microdischarge-based monolithic pressure sensor
CK Eun, X Luo, JC Wang, Z Xiong, M Kushner, Y Gianchandani
Journal of Microelectromechanical Systems 23 (6), 1300-1310, 2014
112014
Atomic precision etch using a low-electron temperature plasma
L Dorf, JC Wang, S Rauf, Y Zhang, A Agarwal, J Kenney, K Ramaswamy, ...
Advanced Etch Technology for Nanopatterning V 9782, 30-37, 2016
102016
Characteristics of a radio-frequency micro-dielectric barrier discharge array
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
Plasma Sources Science and Technology 22 (2), 025015, 2013
102013
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
JC Wang, W Tian, S Rauf, S Sadighi, J Kenney, P Stout, VS Vidyarthi, ...
Plasma Sources Science and Technology 27 (9), 094003, 2018
72018
Relativistic electromagnetic ion cyclotron instabilities
KR Chen, RD Huang, JC Wang, YY Chen
Physical Review E—Statistical, Nonlinear, and Soft Matter Physics 71 (3 …, 2005
72005
Modeling Studies of Atmospheric Pressure Microplasmas: Plasma Dynamics, Surface Interaction and Applications.
JC Wang
22014
Microdischarge-based transducer
Y Gianchandani, EUN Christine, X Luo, M Kushner, Z Xiong, W Jun-Chieh
US Patent 10,006,823, 2018
12018
Modeling of micro-dielectric barrier discharges
JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila, E Hanson
2010 Abstracts IEEE International Conference on Plasma Science, 1-1, 2010
12010
Particle-in-cell simulation of multi-frequency low-pressure capacitively-coupled plasma
JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze
APS Annual Gaseous Electronics Meeting Abstracts, KT2. 005, 2020
2020
Particle-in-cell simulation of multi-frequency capacitively-coupled plasmas at low pressure: a 2D perspective
P Tian, JC Wang, J Kenney, S Rauf, J Schulze, I Korolov
APS Annual Gaseous Electronics Meeting Abstracts, LT2. 034, 2020
2020
Developing Accurate Capacitively Coupled Plasma Models
S Rauf, JC Wang, W Tian, J Kenney
APS Annual Gaseous Electronics Meeting Abstracts, ET1. 003, 2018
2018
Modeling of industrial plasma tools and applications: experimental validation
S Rauf, S Sadighi, A Balakrishna, K Bera, J Kenney, W Tian, JC Wang
Bulletin of the American Physical Society 62, 2017
2017
Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime
JC Wang, J Kenney, A Agarwal, M Nichols, J Rogers, S Rauf
APS Annual Gaseous Electronics Meeting Abstracts, FT2. 004, 2015
2015
Glow-like atmospheric pressure micro-discharges produced by charge rollers
JC Wang, MJ Kushner, S Chang, N Leoni, H Birecki, M Lee, T Anthony, ...
2013 Abstracts IEEE International Conference on Plasma Science (ICOPS), 1-1, 2013
2013
Micro-Plasma Discharges From Charge Rollers in Print Engines
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
APS Meeting Abstracts 1, 2012
2012
Charging of Surfaces with a Wire Corona Discharge: Simulations of Plasma Hydrodynamics with Moving Surfaces
JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila
NIP & Digital Fabrication Conference 28, 490-493, 2012
2012
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