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OSAMU TABATA
OSAMU TABATA
Kyoto University of Advanced Science
Verified email at kuas.ac.jp - Homepage
Title
Cited by
Cited by
Year
Anisotropic etching of silicon in TMAH solutions
O Tabata, R Asahi, H Funabashi, K Shimaoka, S Sugiyama
Sensors and Actuators A: Physical 34 (1), 51-57, 1992
6861992
Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
O Tabata, K Kawahata, S Sugiyama, I Igarashi
Sensors and actuators 20 (1-2), 135-141, 1989
6321989
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
T Tsuchiya, O Tabata, J Sakata, Y Taga
Journal of Microelectromechanical Systems 7 (1), 106-113, 1998
5461998
Micro energy harvesting
D Briand, E Yeatman, S Roundy, O Brand, GK Fedder, C Hierold, ...
Wiley-VCH Verlag GmbH & Company KGaA, 2015
1772015
Micro process engineering: fundamentals, devices, fabrication, and applications
O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
1702013
LIGA and its Applications
U Wallrabe, O Tabata, JG Korvink
Wiley-VCH 7, 51-68, 2009
1572009
Ciliary motion actuator using self-oscillating gel
O Tabata, H Hirasawa, S Aoki, R Yoshida, E Kokufuta
Sensors and Actuators A: Physical 95 (2-3), 234-238, 2002
1502002
Cmos-Mems
H Baltes, O Brand, GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2013
141*2013
Resonant MEMS: fundamentals, implementation, and application
GK Fedder, C Hierold, JG Korvink, O Tabata
John Wiley & Sons, 2015
1262015
Development of passive elements with variable mechanical impedance for wearable robots
S Kawamura, T Yamamoto, D Ishida, T Ogata, Y Nakayama, O Tabata, ...
Proceedings 2002 IEEE International Conference on Robotics and Automation …, 2002
1222002
pH-controlled TMAH etchants for silicon micromachining
O Tabata
Sensors and Actuators A: Physical 53 (1-3), 335-339, 1996
1171996
Comprehensive microsystems
YB Gianchandani, O Tabata, HP Zappe
(No Title), 2008
1132008
Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method
F Dang, S Shinohara, O Tabata, Y Yamaoka, M Kurokawa, Y Shinohara, ...
Lab on a Chip 5 (4), 472-478, 2005
1072005
Monolithic pyroelectric infrared image sensor using PVDF thin film
N Fujitsuka, J Sakata, Y Miyachi, K Mizuno, K Ohtsuka, Y Taga, O Tabata
Sensors and Actuators A: Physical 66 (1-3), 237-243, 1998
1061998
Moving mask UV lithography for three-dimensional structuring
Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
942006
Reliability of MEMS: testing of materials and devices
O Brand, GK Fedder, C Hierold, JG Korvink
John Wiley & Sons, 2008
932008
Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ...
RSC advances 7 (58), 36777-36786, 2017
902017
High-performance genetic analysis on microfabricated capillary array electrophoresis plastic chips fabricated by injection molding
F Dang, O Tabata, M Kurokawa, AA Ewis, L Zhang, Y Yamaoka, ...
Analytical Chemistry 77 (7), 2140-2146, 2005
852005
Micro fabricated tunable bending stiffness devices
O Tabata, S Konishi, P Cusin, Y Ito, F Kawai, S Hirai, S Kawamura
Sensors and Actuators A: Physical 89 (1-2), 119-123, 2001
752001
Fast-response silicon flow sensor with an on-chip fluid temperature sensing element
O Tabata
IEEE transactions on electron devices 33 (3), 361-365, 1986
721986
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