Graphene conductance uniformity mapping JD Buron, DH Petersen, P Bøggild, DG Cooke, M Hilke, J Sun, ... Nano letters 12 (10), 5074-5081, 2012 | 223 | 2012 |
Nano-drive for high resolution positioning and for positioning of a multi-point probe CL Petersen, U Quaade, PF Nielsen, F Grey, P Bøggild US Patent 7,304,486, 2007 | 110 | 2007 |
Micro-four-point probe Hall effect measurement method DH Petersen, O Hansen, R Lin, PF Nielsen Journal of Applied Physics 104 (1), 2008 | 105 | 2008 |
Electrically continuous graphene from single crystal copper verified by terahertz conductance spectroscopy and micro four-point probe JD Buron, F Pizzocchero, BS Jessen, TJ Booth, PF Nielsen, O Hansen, ... Nano letters 14 (11), 6348-6355, 2014 | 102 | 2014 |
Accurate microfour-point probe sheet resistance measurements on small samples S Thorsteinsson, F Wang, DH Petersen, TM Hansen, D Kjær, R Lin, ... Review of Scientific Instruments 80 (5), 2009 | 88 | 2009 |
Review of electrical characterization of ultra-shallow junctions with micro four-point probes DH Petersen, O Hansen, TM Hansen, P Bøggild, R Lin, D Kjær, ... Journal of Vacuum Science & Technology B 28 (1), C1C27-C1C33, 2010 | 67 | 2010 |
Optimized laser thermal annealing on germanium for high dopant activation and low leakage current M Shayesteh, D O’Connell, F Gity, P Murphy-Armando, R Yu, K Huet, ... IEEE Transactions on Electron Devices 61 (12), 4047-4055, 2014 | 59 | 2014 |
Defect evolution and dopant activation in laser annealed Si and Ge F Cristiano, M Shayesteh, R Duffy, K Huet, F Mazzamuto, Y Qiu, M Quillec, ... Materials Science in Semiconductor Processing 42, 188-195, 2016 | 53 | 2016 |
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions DH Petersen, R Lin, TM Hansen, E Rosseel, W Vandervorst, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 53 | 2008 |
Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing G Hellings, E Rosseel, E Simoen, D Radisic, DH Petersen, O Hansen, ... Electrochemical and Solid-State Letters 14 (1), H39, 2010 | 50 | 2010 |
Fast and direct measurements of the electrical properties of graphene using micro four-point probes MB Klarskov, HF Dam, DH Petersen, TM Hansen, A Löwenborg, TJ Booth, ... Nanotechnology 22 (44), 445702, 2011 | 47 | 2011 |
On the analysis of the activation mechanisms of sub-melt laser anneals T Clarysse, J Bogdanowicz, J Goossens, A Moussa, E Rosseel, ... Materials Science and Engineering: B 154, 24-30, 2008 | 30 | 2008 |
Systematic study of shallow junction formation on germanium substrates G Hellings, E Rosseel, T Clarysse, DH Petersen, O Hansen, PF Nielsen, ... Microelectronic engineering 88 (4), 347-350, 2011 | 22 | 2011 |
Anomalous activation of shallow B+ implants in Ge BR Yates, BL Darby, NG Rudawski, KS Jones, DH Petersen, O Hansen, ... Materials Letters 65 (23-24), 3540-3543, 2011 | 21 | 2011 |
Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm A Cagliani, FW Østerberg, O Hansen, L Shiv, PF Nielsen, DH Petersen Review of Scientific Instruments 88 (9), 2017 | 14 | 2017 |
Advanced carrier depth profiling on Si and Ge with micro four-point probe T Clarysse, P Eyben, B Parmentier, B Van Daele, A Satta, W Vandervorst, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 14 | 2008 |
3ω correction method for eliminating resistance measurement error due to Joule heating B Guralnik, O Hansen, HH Henrichsen, B Beltrán-Pitarch, FW Østerberg, ... Review of Scientific Instruments 92 (9), 2021 | 13 | 2021 |
Ultra low contact resistivity (< 1×10−8Ω-cm2) to In0.53Ga0.47As fin sidewall (110)/(100) surfaces: Realized with a VLSI processed III–V fin TLM structure … RTP Lee, Y Ohsawa, C Huffman, Y Trickett, G Nakamura, C Hatem, ... 2014 IEEE International Electron Devices Meeting, 32.4. 1-32.4. 4, 2014 | 11 | 2014 |
Micro-scale sheet resistance measurements on ultra shallow junctions CL Petersen, R Lin, DH Petersen, PF Nielsen 2006 14th IEEE International Conference on Advanced Thermal Processing of …, 2006 | 11 | 2006 |
Precision of single-engage micro Hall effect measurements HH Henrichsen, O Hansen, D Kjaer, PF Nielsen, F Wang, DH Petersen 2014 International Workshop on Junction Technology (IWJT), 1-4, 2014 | 10 | 2014 |