Oliver Paul
Oliver Paul
Professor for Microsystems Engineering, University of Freiburg
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Cited by
Cited by
Mikrosystemtechnik für Ingenieure
W Menz, O Paul
John Wiley & Sons, 2012
Magnetic phase transition in two-dimensional ultrathin Fe films on Au (100)
W Dürr, M Taborelli, O Paul, R Germar, W Gudat, D Pescia, M Landolt
Physical review letters 62 (2), 206-209, 1989
Micromachined thermally based CMOS microsensors
H Baltes, O Paul, O Brand
Proceedings of the IEEE 86 (8), 1660-1678, 1998
Microsystem technology
W Menz, J Mohr, O Paul
John Wiley & Sons, 2008
MEMS: A practical guide of design, analysis, and applications
J Korvink, O Paul
Springer Science & Business Media, 2010
Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
M Von Arx, O Paul, H Baltes
Journal of Microelectromechanical systems 9 (1), 136-145, 2000
GaN-based micro-LED arrays on flexible substrates for optical cochlear implants
C Goßler, C Bierbrauer, R Moser, M Kunzer, K Holc, W Pletschen, ...
Journal of Physics D: Applied Physics 47 (20), 205401, 2014
Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
S Herwik, S Kisban, AAA Aarts, K Seidl, G Girardeau, K Benchenane, ...
Journal of Micromechanics and Microengineering 19 (7), 074008, 2009
Multifunctional ZnO‐nanowire‐based sensor
A Menzel, K Subannajui, F Güder, D Moser, O Paul, M Zacharias
Advanced Functional Materials 21 (22), 4342-4348, 2011
Mechanical properties of thin films from the load deflection of long clamped plates
V Ziebart, O Paul, U Munch, J Schwizer, H Baltes
Journal of Microelectromechanical Systems 7 (3), 320-328, 1998
Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array
A Schaufelbuhl, N Schneeberger, U Munch, M Waelti, O Paul, O Brand, ...
Journal of Microelectromechanical systems 10 (4), 503-510, 2001
Strongly buckled square micromachined membranes
V Ziebart, O Paul, H Baltes
Journal of Microelectromechanical Systems 8 (4), 423-432, 1999
Impeded thermal transport in Si multiscale hierarchical architectures with phononic crystal nanostructures
M Nomura, Y Kage, J Nakagawa, T Hori, J Maire, J Shiomi, R Anufriev, ...
Physical Review B 91 (20), 205422, 2015
CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording
K Seidl, S Herwik, T Torfs, HP Neves, O Paul, P Ruther
Journal of Microelectromechanical Systems 20 (6), 1439-1448, 2011
Single-chip CMOS anemometer
F Mayer, A Haberli, H Jacobs, G Ofner, O Paul, H Baltes
International Electron Devices Meeting. IEDM Technical Digest, 895-898, 1997
High-density μLED-based optical cochlear implant with improved thermomechanical behavior
E Klein, C Gossler, O Paul, P Ruther
Frontiers in neuroscience 12, 659, 2018
Recent progress in neural probes using silicon MEMS technology
P Ruther, S Herwik, S Kisban, K Seidl, O Paul
IEEJ Transactions on electrical and electronic engineering 5 (5), 505-515, 2010
Thermal phonon transport in silicon nanowires and two-dimensional phononic crystal nanostructures
M Nomura, J Nakagawa, Y Kage, J Maire, D Moser, O Paul
Applied Physics Letters 106 (14), 2015
In-plane silicon probes for simultaneous neural recording and drug delivery
K Seidl, S Spieth, S Herwik, J Steigert, R Zengerle, O Paul, P Ruther
Journal of Micromechanics and Microengineering 20 (10), 105006, 2010
Two-dimensional integrated gas flow sensors by CMOS IC technology
J Robadey, O Paul, H Baltes
Journal of Micromechanics and Microengineering 5 (3), 243, 1995
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