A very low loss 220–325 GHz silicon micromachined waveguide technology B Beuerle, J Campion, U Shah, J Oberhammer IEEE Transactions on Terahertz science and technology 8 (2), 248-250, 2018 | 88 | 2018 |
a 500–750 ghz rf mems waveguide switch U Shah, T Reck, H Frid, C Jung-Kubiak, G Chattopadhyay, I Mehdi, ... IEEE Transactions on Terahertz Science and Technology 7 (3), 326-334, 2017 | 67 | 2017 |
Submillimeter-wave 3.3-bit RF MEMS phase shifter integrated in micromachined waveguide U Shah, E Decrossas, C Jung-Kubiak, T Reck, G Chattopadhyay, I Mehdi, ... IEEE Transactions on Terahertz Science and Technology 6 (5), 706-715, 2016 | 57 | 2016 |
High-aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires SJ Bleiker, AC Fischer, U Shah, N Somjit, T Haraldsson, N Roxhed, ... IEEE Transactions on components, packaging and Manufacturing technology 5 (1 …, 2014 | 49 | 2014 |
Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700 O Glubokov, X Zhao, J Campion, U Shah, J Oberhammer IEEE Transactions on Terahertz Science and Technology 9 (1), 106-108, 2018 | 47 | 2018 |
Compact silicon-micromachined wideband 220–330-GHz turnstile orthomode transducer A Gomez-Torrent, U Shah, J Oberhammer IEEE Transactions on Terahertz Science and Technology 9 (1), 38-46, 2018 | 46 | 2018 |
Micromachined multilayer bandpass filter at 270 GHz using dual-mode circular cavities O Glubokov, X Zhao, B Beuerle, J Campion, U Shah, J Oberhammer 2017 IEEE MTT-S International Microwave Symposium (IMS), 1449-1452, 2017 | 45 | 2017 |
Silicon micromachined D-band diplexer using releasable filling structure technique X Zhao, O Glubokov, J Campion, A Gomez-Torrent, A Krivovitca, U Shah, ... IEEE Transactions on Microwave Theory and Techniques 68 (8), 3448-3460, 2020 | 43 | 2020 |
Toward industrial exploitation of THz frequencies: Integration of SiGe MMICs in silicon-micromachined waveguide systems J Campion, A Hassona, ZS He, B Beuerle, A Gomez-Torrent, U Shah, ... IEEE Transactions on Terahertz Science and Technology 9 (6), 624-636, 2019 | 43 | 2019 |
Investigation of Fabrication Accuracy and Repeatability of High- Silicon-Micromachined Narrowband Sub-THz Waveguide Filters O Glubokov, X Zhao, J Campion, B Beuerle, U Shah, J Oberhammer IEEE Transactions on Microwave Theory and Techniques 67 (9), 3696-3706, 2019 | 39 | 2019 |
High-directivity MEMS-tunable directional couplers for 10–18-GHz broadband applications U Shah, M Sterner, J Oberhammer IEEE transactions on microwave theory and techniques 61 (9), 3236-3246, 2013 | 33 | 2013 |
An ultra low-loss silicon-micromachined waveguide filter for D-band telecommunication applications J Campion, O Glubokov, A Gomez, A Krivovitca, U Shah, L Bolander, Y Li, ... 2018 IEEE/MTT-S International Microwave Symposium-IMS, 583-586, 2018 | 31 | 2018 |
Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies J Campion, U Shah, J Oberhammer 2017 IEEE MTT-S International Microwave Symposium (IMS), 1262-1265, 2017 | 29 | 2017 |
Low-loss, high-linearity RF interposers enabled by through glass vias U Shah, J Liljeholm, J Campion, T Ebefors, J Oberhammer IEEE Microwave and Wireless Components Letters 28 (11), 960-962, 2018 | 28 | 2018 |
Micromachined subterahertz waveguide-integrated phase shifter utilizing supermode propagation X Zhao, U Shah, O Glubokov, J Oberhammer IEEE Transactions on Microwave Theory and Techniques 69 (7), 3219-3227, 2021 | 26 | 2021 |
Microwave MEMS devices designed for process robustness and operational reliability M Sterner, N Somjit, U Shah, S Dudorov, D Chicherin, A Räisänen, ... International Journal of Microwave and Wireless Technologies 3 (5), 547-563, 2011 | 26 | 2011 |
A 230–300 GHz low-loss micromachined waveguide hybrid coupler J Svedin, R Malmqvist, B Beuerle, U Shah, J Oberhammer 2017 47th European microwave conference (EuMC), 616-619, 2017 | 23 | 2017 |
A 220–325 GHz low-loss micromachined waveguide power divider R Malmqvist, A Gustafsson, J Svedin, B Beuerle, U Shah, J Oberhammer 2017 IEEE Asia Pacific Microwave Conference (APMC), 291-294, 2017 | 18 | 2017 |
Micromachined silicon-core substrate-integrated waveguides at 220–330 GHz A Krivovitca, U Shah, O Glubokov, J Oberhammer IEEE Transactions on Microwave Theory and Techniques 68 (12), 5123-5131, 2020 | 15 | 2020 |
Multi-position RF MEMS tunable capacitors using laterally moving sidewalls of 3-D micromachined transmission lines U Shah, M Sterner, J Oberhammer IEEE Transactions on Microwave theory and techniques 61 (6), 2340-2352, 2013 | 15 | 2013 |