Follow
Fang Liu
Fang Liu
Verified email at berkeley.edu
Title
Cited by
Cited by
Year
Graphitization of n-type polycrystalline silicon carbide for on-chip supercapacitor application
F Liu, A Gutes, I Laboriante, C Carraro, R Maboudian
Applied Physics Letters 99 (11), 2011
582011
Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications
F Liu, C Carraro, AP Pisano, R Maboudian
Journal of Micromechanics and Microengineering 20 (3), 035011, 2010
502010
Versatile CMOS-MEMS integrated piezoelectric platform
JM Tsai, M Daneman, B Boser, D Horsley, M Rais-Zadeh, HY Tang, Y Lu, ...
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
442015
Residual stress characterization of polycrystalline 3C-SiC films on Si (100) deposited from methylsilane
F Liu, C Carraro, J Chu, R Maboudian
Journal of Applied Physics 106 (1), 2009
422009
Low frequency response microphone diaphragm structures and methods for producing the same
F Liu, KL Yang
US Patent 8,946,831, 2015
282015
Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure
GH Li, I Laboriante, F Liu, M Shavezipur, B Bush, C Carraro, ...
Journal of Micromechanics and Microengineering 20 (9), 095015, 2010
282010
Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide
F Liu, B Hsia, C Carraro, AP Pisano, R Maboudian
Applied Physics Letters 97 (26), 2010
242010
Ex situ vapor phase boron doping of silicon nanowires using BBr3
GS Doerk, G Lestari, F Liu, C Carraro, R Maboudian
Nanoscale 2 (7), 1165-1170, 2010
172010
Integrated CMOS back cavity acoustic transducer and the method of producing the same
F Liu, MJ Daneman, B Kim, A Minervini
US Patent 9,299,671, 2016
162016
Interfacial adhesion between rough surfaces of polycrystalline silicon and its implications for M/NEMS technology
I Laboriante, B Bush, D Lee, F Liu, TJK Liu, C Carraro, R Maboudian
Journal of adhesion science and technology 24 (15-16), 2545-2556, 2010
162010
Microphone system with mechanically-coupled diaphragms
F Liu, KL Yang
US Patent 9,143,870, 2015
152015
Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes
F Liu, CS Roper, J Chu, C Carraro, R Maboudian
Sensors and Actuators A: Physical 166 (2), 201-206, 2011
152011
Piezoelectric acoustic resonator based sensor
F Liu, JML Tsai, X Li, M Daneman
US Patent 9,618,405, 2017
132017
Magnetic micromechanical structures based on CoNi electrodeposited alloys
P Cojocaru, L Magagnin, E Gomez, E Vallés, F Liu, C Carraro, ...
Journal of Micromechanics and Microengineering 20 (12), 125017, 2010
122010
Gas sensing device with chemical and thermal conductivity sensing
F Liu, P Hartwell, M Lim, Y Yang
US Patent 10,598,621, 2020
102020
Effect of illlumination on thermionic emission from microfabricated silicon carbide structures
JH Lee, I Bargatin, J Provine, F Liu, MK Seo, R Maboudian, ...
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
82011
Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline 3C-silicon carbide
F Liu, CH Li, AP Pisano, C Carraro, R Maboudian
Journal of Vacuum Science & Technology A 28 (5), 1259-1262, 2010
82010
In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument
F Liu, I Laboriante, B Bush, CS Roper, C Carraro, R Maboudian
Applied Physics Letters 95 (13), 2009
82009
Microphone with parasitic capacitance cancelation
F Liu, KL Yang
US Patent 8,755,541, 2014
72014
System and method for detecting surface charges of a MEMS device
F Liu, KL Yang
US Patent 9,174,837, 2015
62015
The system can't perform the operation now. Try again later.
Articles 1–20