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Dimitri Kioussis
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Cited by
Year
Air gap semiconductor structure with selective cap bilayer
SM Gates, EE Huang, DR Kioussis, CJ Penny, D Priyadarshini
US Patent 9,305,836, 2016
3722016
Vertically stacked gate-all-around Si nanowire transistors: Key process optimizations and ring oscillator demonstration
H Mertens, R Ritzenthaler, V Pena, G Santoro, K Kenis, A Schulze, ...
2017 IEEE international electron devices meeting (IEDM), 37.4. 1-37.4. 4, 2017
1222017
Reactive nitrogen and phosphorus removal from aquaculture wastewater effluents using polymer hydrogels
DR Kioussis, FW Wheaton, P Kofinas
Aquacultural Engineering 23 (4), 315-332, 2000
1132000
Germanium etching systems and methods
M Korolik, N Ingle, D Kioussis
US Patent 10,043,674, 2018
942018
Reactive phosphorus removal from aquaculture and poultry productions systems using polymeric hydrogels
P Kofinas, DR Kioussis
Environmental science & technology 37 (2), 423-427, 2003
792003
Characterization of anion diffusion in polymer hydrogels used for wastewater remediation
DR Kioussis, P Kofinas
Polymer 46 (22), 9342-9347, 2005
702005
Phosphate binding polymeric hydrogels for aquaculture wastewater remediation
DR Kioussis, FW Wheaton, P Kofinas
Aquacultural engineering 19 (3), 163-178, 1999
621999
Characterization of network morphology in anion binding hydrogels used for wastewater remediation
DR Kioussis, P Kofinas
Polymer 46 (23), 10167-10172, 2005
422005
Ammonium perchlorate–binding poly (allylamine hydrochloride) hydrogels for wastewater remediation
DR Kioussis, DF Smith, P Kofinas
Journal of applied polymer science 80 (11), 2073-2083, 2001
312001
CPI Challenges to BEOL at 28nm Node and Beyond
V Ryan, D Breuer, H Geisler, D Kioussis, MU Lehr, J Paul, K Machani, ...
2012 IEEE International Reliability Physics Symposium (IRPS), 2E. 1.1-2E. 1.6, 2012
192012
Method for fabricating junctions and spacers for horizontal gate all around devices
N Yoshida, L Dong, S Sun, M Kim, NS Kim, D Kioussis, M Korolik, ...
US Patent 10,177,227, 2019
152019
Evaluation of barrier CMP slurries and characterization of ULK material properties shifts due to CMP
WT Tseng, D Kioussis, SL Manikonda, HK Kim, J Choi, F Zhao, ...
ECS Transactions 13 (2), 293, 2008
62008
Air gap structure with bilayer selective cap
SM Gates, EE Huang, DR Kioussis, CJ Penny, D Priyadarshini
US Patent App. 14/961,966, 2016
52016
Experimental confirmation of electron fluence driven, Cu catalyzed interface breakdown model for low-k TDDB
F Chen, J Gambino, M Shinosky, J Aitken, E Huang, S Cohen, CC Yang, ...
2012 IEEE International Reliability Physics Symposium (IRPS), 3A. 3.1-3A. 3.9, 2012
52012
Competitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies
R Augur, C Child, JH Ahn, TJ Tang, L Clevenger, D Kioussis, H Masuda, ...
Microelectronic engineering 92, 42-44, 2012
52012
Air gap semiconductor structure with selective cap bilayer
SM Gates, EE Huang, DR Kioussis, CJ Penny, D Priyadarshini
US Patent 9,960,117, 2018
42018
Method of forming an air gap semiconductor structure with selective cap bilayer
SM Gates, EE Huang, DR Kioussis, CJ Penny, D Priyadarshini
US Patent 9,711,455, 2017
42017
Optimized interfacial strength for dense and porous SiCOH
DD Restaino, S Molis, A Grill, VV Patel, MW Lane, T Cheng, A Demos, ...
Advanced Metallization Conference, 2008
42008
Multi-zone gas distribution systems and methods
S Singh, KD Schatz, A Tso, M Wijekoon, D Kioussis
US Patent 10,903,054, 2021
32021
The strength of BEOL structures fabricated using low K materials and its impact on CPI failures
TM Shaw, XH Liu, E Misra, D Questad, G Bonilla, T Wassick, M Lamorey, ...
2015 IEEE International Integrated Reliability Workshop (IIRW), 115-118, 2015
22015
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